Bareboard Inspection (Phoenix Family)

Phoenix Ultima 

Phoenix Ultima is designed to support high volume manufacturing of IC Substrates. It is capable to scan down to to 4 µm line/space width technology.

Phoenix Nano

Phoenix Nano is designed to support high volume manufacturing of IC substrates. It is capable to  scan down to 5 µm line/space width technology.

Phoenix Micro

Phoenix Micro is designed to support high volume manufacturing of of IC Substrates. It is capable to  scan down to 7 µm line/space  width technology.

Phoenix Maxima

Phoenix Maxima is designed to support high volume manufacturing of IC Substrates and ultra fine line HDI. It is capable to scan down to 10 µm line/space width technology.

Bareboard Inspection (Galaxy Family)

Galaxy 4χ

Galaxy 4χ is designed to support high volume manufacturing of IC Substrates. It is capable to scan down to to 4 µm line/space width technology.

Galaxy 5χ

Galaxy 5χ is designed to support high volume manufacturing of IC substrates. It is capable to  scan down to 5 µm line/space width technology.

Galaxy 7χ

Galaxy 7χ is designed to support high volume manufacturing of of IC Substrates. It is capable to scan down to 7 µm line/space width technology.

Galaxy 10χ

Galaxy 10χ is designed to support high volume manufacturing of IC Substrates and ultra fine line HDI. It is capable to scan down to 10 µm line/space width technology.

Verification Systems

CVR 100 IC

CVR 100 IC, CIMS verification station, is designed to support high volume manufacturing of IC Substrates. It is optimized for verification of 5 ~ 25 µm line/space width technology. .

CVR 100 FL

CVR 100 FL, CIMS verification station, is designed to support high volume manufacturing of HDI and IC Substrates. It is optimized for verification of 10 ~ 30 µm line/space width technology.

Hybrid Verification Systems

VVR for ICS

VVR, CIMS verification station that combines virtual and physical verification within a single workstation. VVR for ICS is optimized for verification of 4 ~ 15 µm line/space width technology.

Photo-Tools Inspection

Phoenix PT/Micro

Phoenix PT/Micro, CIMS photo-tools AOI system, is designed to inspect high-resolution film artworks and glass masks. It is capable to scan down to 7 µm line/space width technology.

Phoenix PT+

Phoenix PT+, CIMS photo-tools AOI system, is designed to inspect high-resolution film artworks and glass masks. It is capable to scan down to 12.5 µm line/space width technology.