Productivity:
4 ultra-light carbon test heads with air bearings
Stability:
Granit base frame for highest accuracy
Flexibility:
Supports high-end substrate applications
Description
The S3 is able to test 10 µm structures while achieving 100 measurements per second. The machine, therefore, provides the customer with an economical test solution for high-end substrates.
The S3 has a granite frame, which provides the best temperature stability. The high-resolution cameras of 1.2 µm per pixel allow automatic scanning and testing of 10 µm.
Key benefits
Catering to the needs of substrate testing;
The system combines accuracy and low witness marks with high throughput. The semi-automatic dual shuttle system concept gives best system utilization.
Specifications
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4 test heads |
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Ceramic air bearings for ultra-precise and sensitive contacting |
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Max. test area mode |
300 mm x 310 mm (11.8"x 12.2") |
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Max. product size |
330 mm x 310 mm (13.0" x 12.2") |
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Vacuum table for reference-based test |
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Test speed |
up to 120 TP/sec (depending on test method) |
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Smallest pad size |
10 µm (0.4 mil) |
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Smallest pitch size |
25 µm (1.0 mil) |
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5-megapixel high-solution camera with 1.2 µm/px |
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No visible witness marks without sacrificing test speed |
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Options
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High-speed Kelvin 4 wire test up to 300 mA, Embedded component test SECS/GEM integration on demand |
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Customized automation setup on request |
